Publication:            VHF free-free beam high-Q micromechanical resonators
                              Kun Wang; Yinglei Yu; Ark-Chew Wong; Nguyen, C.T.-C.
                              Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth
                              IEEE International Conference on , 1999 , Page(s): 453 -458